Micro and Nanofabrication Technology
Code
10547
Academic unit
Faculdade de Ciências e Tecnologia
Department
Departamento de Ciências dos Materiais
Credits
3.0
Teacher in charge
Elvira Maria Correia Fortunato
Weekly hours
4
Total hours
52
Teaching language
Português
Objectives
The discipline of Technology of Micro and Nanomanufacturing (TMN) aims to introduce the different technologies related to Micro and Nanomanufacturing students of master in engineering physics. In addition to a general introduction about the problems of nanotechnology are also
Prerequisites
Basic knowledge of physics, chemistry and mathematics.
Subject matter
Theoretical/Pratical classes
• Introduction: the importance of nanotechnology and the development of miniaturization;
• Lithography;
• Dry Erosion (subtractivas techniques);
• CVD and PVD (additive techniques);
• Techniques for Micro-and Nanofabrication (application to MEMS and NEMS);
Lab classes
Work 1-Photolithography technique (top-down)
Work 2-Technology Lab-on-Paper
Work 3-synthesis of ZnO nanostructures with UV sensors application on paper
Work 4 – NPs synthesis of silver (bottom-up)
Bibliography
- Marc J. Madou "Fundamentals of Nanofabrication", 2nd Edition, CRC Press (2002).
- Elements provided in class.
Teaching method
The syllabus of the COURSE will be conducted according to an expository method (with the presentation of diapositivosDatashow), promoting the dialogue-oriented interaction and discussion with students in the classroom, stimulating educational action. The theoretical classes are complemented with 4 laboratory practical work, promoting a strong link between theory and practice.
Evaluation method
The evaluation of discipline against the experimental nature, is divided into two parts:
50% Exam
50% 4 mini reports including the oral discussion in the form of presentation